Abstract :
Photolithography is believed to be a complementary technique to large-area printing, allowing for nanometer-scale integration and offering cost-efficiency. For organic electronics though, adapting photolithography is very challenging due to chemical incompatibilities. However, with the help of Alexander Zakhidov, orthogonal resins opened up the prospect of adapting the well-established process of photolithography for organic electronics. Here, we present a hybrid fabrication method for organic electrochemical transistors by combining orthogonal photolithography and inkjet printing, enabling high uniformity and reliability. We demonstrate how the resolution of each process affects the uniformity, and we explore the advantages of this process for device scaling and circuit integration.
Meier, T., Yoon, Y., Teuerle, L. et al. A hybrid process for integration of organic electrochemical transistors for high uniformity & reliability. MRS Communications 14, 149–157 (2024). https://doi.org/10.1557/s43579-023-00498-0
